Microstructuring is a process for creating tiny and very delicate structures for applications in microtechnology. Different materials such as steel, ceramics, hard metals, plastics as well as composite materials are processed by means of micro-spark erosion or laser ablation. The advantage of laser structuring is a better surface quality compared with eroded workpieces. Laser ablation can produce enamel-free surfaces with a roughness value in the region of Ra < 0.5 μm. In industry, microstructure fabrication is mainly performed with a nanosecond laser. The advantage of the nanosecond laser is that selective removal of metal layers on plastic or ceramics for example are possible, as well as layer removal with materials such as piezoceramics or sapphire.